EVAPORATION BAFFLE MECHANISM AND EVAPORATION DEVICE - WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD

Title:

EVAPORATION BAFFLE MECHANISM AND EVAPORATION DEVICE

Document Type and Number:

WIPO Patent Application WO/2020/093479

Kind Code:

A1

Abstract:

Disclosed are an evaporation baffle mechanism and an evaporation device. The evaporation device comprises a cavity (2), an evaporation baffle mechanism (3) and an evaporation source (4), wherein the evaporation baffle mechanism (3) comprises a baffle assembly (31) and a drive source (32), the baffle assembly (31) has an angle limiting plate (311) and an evaporation aperture (312), the evaporation aperture (312) is formed on the angle limiting plate (311), the drive source (32) and the baffle assembly (31) are mounted together, and the drive source (32) drives the baffle assembly (31) to move upwards or downwards so as to shrink or expand an evaporation area.

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Inventors:

ZHU QIUHONG (CN)
SHI ZHAN (CN)

Application Number:

PCT/CN2018/117823

Publication Date:

May 14, 2020

Filing Date:

November 28, 2018

Export Citation:

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Assignee:

WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)

International Classes:

C23C14/24; C23C14/00; G02B1/10

Foreign References:

CN207749179U	2018-08-21
CN103540898A	2014-01-29

Attorney, Agent or Firm:

ESSEN PATENT&TRADEMARK AGENCY (CN)

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