Title:
INTERFEROMETER AND PHYSICAL QUANTITY MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/182359
Kind Code:
A1
Abstract:
This interferometer is characterized by comprising a wedge (62) having a first plate glass part (621) constituted from a glass plate, and a second plate glass part (622) arranged so as to be inclined with respect to the first plate glass part (621) and formed from a glass plate, a first support part (623) and a second support part (624) which are formed using members having a small coefficient of linear expansion and which prescribe the inclination of the first plate glass part (621) and the second plate glass part (622) being arranged between the first plate glass part (621) and the second plate glass part (622).
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Inventors:
OGAWA KEN (JP)
FUJITA KEIICHI (JP)
KOBAYASHI HIROKI (JP)
YAMATE TSUTOMU (JP)
FUJITA KEIICHI (JP)
KOBAYASHI HIROKI (JP)
YAMATE TSUTOMU (JP)
Application Number:
PCT/JP2023/011245
Publication Date:
September 28, 2023
Filing Date:
March 22, 2023
Export Citation:
Assignee:
NAGANO KEIKI CO LTD (JP)
International Classes:
G01B9/02055; G01B9/02098; G01B11/00
Domestic Patent References:
| WO2022191201A1 | 2022-09-15 |
Foreign References:
| US20080187011A1 | 2008-08-07 | |||
| JP2022003682A | 2022-01-11 | |||
| US7046374B1 | 2006-05-16 | |||
| JPH0315727A | 1991-01-24 | |||
| JPH07239208A | 1995-09-12 |
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
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