MASK UNIT AND DEPOSITION DEVICE

Title:

MASK UNIT AND DEPOSITION DEVICE

Document Type and Number:

WIPO Patent Application WO/2014/010284

Kind Code:

A1

Abstract:

A mask unit (1) is configured such that, in a planar view, the total opening lengths of apertures (S) that are not covered by a beam part (22) in the Y-direction are equal at any position in the X-direction in the apertures (S) of a deposition mask (10). The portion of the beam part (22) that is in contact with the deposition mask (10) does not span a frame unit (21) along the Y-direction, and transverses the Y-direction in a continuous or intermittent manner.

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Inventors:

OCHI TAKASHI
KAWATO SHINICHI
OSAKI TOMOFUMI
NIBOSHI MANABU
KOSAKA TOMOHIRO
TSUKAMOTO YUTO
KIKUCHI KATSUHIRO

Application Number:

PCT/JP2013/061201

Publication Date:

January 16, 2014

Filing Date:

April 15, 2013

Export Citation:

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Assignee:

SHARP KK (JP)

International Classes:

C23C14/04; C23C14/24; H01L51/50; H05B33/10

Foreign References:

JP2004043877A	2004-02-12
JPH09320758A	1997-12-12
JP2006294280A	2006-10-26
JP2006233286A	2006-09-07

Attorney, Agent or Firm:

HARAKENZO WORLD PATENT & TRADEMARK (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)

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