Title:
METHOD OF DETACHING PLATELIKE SUBSTANCE AND APPARATUS THEREFOR
Document Type and Number:
WIPO Patent Application WO/2007/080714
Kind Code:
A1
Abstract:
A glass substrate detaching apparatus that is capable of efficiently, stably detaching
a glass substrate from an adsorption sheet. There is provided a method of detaching
a platelike substance held by adsorption on an adsorption sheet from the adsorption
sheet, characterized in that detaching of the platelike substance from the adsorption
sheet is carried out by retaining the platelike substance held by adsorption
on an adsorption sheet from the plane opposite to the adsorption sheet by multiple
adsorption pads; emitting a jet of pressurized water through a pressurized water
supply nozzle toward a boundary region between the platelike substance and the
adsorption sheet to thereby cause an edge of the platelike substance to depart
from the adsorption sheet; and while further feeding a pressurized water to the
interstice between the departed edge of the platelike substance and the adsorption
sheet to thereby cancel the adsorption of the platelike substance onto the adsorption
sheet, moving the adsorption pads in the direction of detachment.
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Inventors:
IKUTA YASUNARI (JP)
SUZUKI TAKEO (JP)
SUZUKI TAKEO (JP)
Application Number:
PCT/JP2006/323740
Publication Date:
July 19, 2007
Filing Date:
November 28, 2006
Export Citation:
Assignee:
ASAHI GLASS CO LTD (JP)
IKUTA YASUNARI (JP)
SUZUKI TAKEO (JP)
IKUTA YASUNARI (JP)
SUZUKI TAKEO (JP)
International Classes:
B23Q3/08; B24B41/06
Foreign References:
| JP2000094319A | 2000-04-04 | |||
| JP2000084844A | 2000-03-28 | |||
| JPH09295236A | 1997-11-18 | |||
| JP2004195607A | 2004-07-15 |
Attorney, Agent or Firm:
SENMYO, Kenji et al. (38 Kanda-Higashimatsushitacho, Chiyoda-k, Tokyo 42, JP)
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