Title:
OXIDE-SINTERED-BODY SPUTTERING TARGET AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2017/110909
Kind Code:
A1
Abstract:
An oxide-sintered-body sputtering target according to an embodiment of the present invention is formed of a sintered body containing an indium oxide, a zinc oxide, a titanium oxide, and a zirconium oxide, wherein the atomic ratio of titanium with respect to the sum of the amounts of indium, zinc, and titanium is 0.1-20 %, and the specific weight of zirconium with respect to the sum of indium oxide, zinc oxide, titanium oxide, and zirconium oxide is 10-2000 ppm.
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Inventors:
TAKAHASHI KAZUTOSHI (JP)
HIDAKA KOJI (JP)
KAWAGOE YUU (JP)
TAKESUE KENTAROU (JP)
WADA MASARU (JP)
UENO MITSURU (JP)
KIYOTA JUNYA (JP)
KOBAYASHI MOTOSHI (JP)
TAKEI MASAKI (JP)
HIDAKA KOJI (JP)
KAWAGOE YUU (JP)
TAKESUE KENTAROU (JP)
WADA MASARU (JP)
UENO MITSURU (JP)
KIYOTA JUNYA (JP)
KOBAYASHI MOTOSHI (JP)
TAKEI MASAKI (JP)
Application Number:
PCT/JP2016/088182
Publication Date:
June 29, 2017
Filing Date:
December 21, 2016
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
C23C14/34; C04B35/01
Domestic Patent References:
| WO2015059938A1 | 2015-04-30 | |||
| WO2012077512A1 | 2012-06-14 |
Foreign References:
| JPH11256321A | 1999-09-21 | |||
| JP2006206384A | 2006-08-10 |
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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