PATTERN MEASURING APPARATUS AND PATTERN MEASURING METHOD

Title:

PATTERN MEASURING APPARATUS AND PATTERN MEASURING METHOD

Document Type and Number:

WIPO Patent Application WO/2011/052070

Kind Code:

A1

Abstract:

Provided are pattern measuring apparatus and a pattern measuring method by which influences of SEM image noise and edge roughness are reduced and the corner shape of a pattern can be highly accurately measured. The pattern measuring apparatus has: an irradiating means which irradiates a sample with an electron beam; an electron detecting means which detects, by means of electron beam irradiation, the quantity of the electrons generated from the sample having the pattern formed thereon; an image processing means which generates an SEM image of the pattern based on the electron quantity; and a control means, which obtains a rectangular measurement specifying region which specifies a portion to be measured in the SEM image, and calculates the loss ratio of the corner section of the pattern, based on the area of the measurement specifying region and that of the corner section of the pattern. The control means detects an edge position within a predetermined range with respect to the position where an angle of the measurement specifying region and the side of the SEM image intersect, and adjusts the measurement specifying region corresponding to the edge position.

More Like This:

JP3720201	MANUFACTURE OF SCANNING ELECTRON MICROSCOPE SYSTEM AND INTEGRATED CIRCUIT
JPS60117105	RADIANT RAY SCINTILLATOR
JP4778778	Semiconductor device monitoring method and monitoring device

Inventors:

FUKAYA HIROSHI (JP)
MATSUMOTO JUN (JP)

Application Number:

PCT/JP2009/068681

Publication Date:

May 05, 2011

Filing Date:

October 30, 2009

Export Citation:

Click for automatic bibliography generation Help

Assignee:

ADVANTEST CORP (JP)
FUKAYA HIROSHI (JP)
MATSUMOTO JUN (JP)

International Classes:

G01B15/04; G01N23/225; H01J37/22; H01J37/28; H01L21/027; H01L21/66

Domestic Patent References:

WO2008032488A1

2008-03-20

Foreign References:

JP2002296761A	2002-10-09
JP2004125690A	2004-04-22
JP2002162216A	2002-06-07
JP2001183116A	2001-07-06
JPH10339615A	1998-12-22

Attorney, Agent or Firm:

OKAMOTO, KEIZO (JP)
Keizo Okamoto (JP)

Download PDF:

View/Download PDF PDF Help

Previous Patent: FEMALE PIPE JOINT

Next Patent: TURBOCHARGING SYSTEM OF INTERNAL COMBUSTION ENGINE