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Title:
PROTECTIVE FILM-FORMING COMPOSITE SHEET
Document Type and Number:
WIPO Patent Application WO/2017/149890
Kind Code:
A1
Abstract:
This protective film-forming composite sheet is provided with a support sheet, is provided with a protective film-forming film on one surface of the support sheet, and is provided with a coating layer on the surface of the support sheet opposite of where the protective film-forming film is provided, wherein the surface roughness Ra of the surface of the coating layer opposite of the side contacting the support sheet is less than the surface roughness Ra of the surface of the support sheet on the side where the coating layer is provided.

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Inventors:
SAIKI NAOYA (JP)
SASAKI HARUKA (JP)
YONEYAMA HIROYUKI (JP)
YAMAMOTO DAISUKE (JP)
Application Number:
PCT/JP2016/086539
Publication Date:
September 08, 2017
Filing Date:
December 08, 2016
Export Citation:
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Assignee:
LINTEC CORP (JP)
International Classes:
H01L21/301; H01L23/00
Foreign References:
JP5774799B22015-09-09
JP5080831B22012-11-21
JP5607847B12014-10-15
JP2014189563A2014-10-06
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
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