Title:
SAMPLE INSPECTION DEVICE AND SAMPLE INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/131410
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a sample inspection device in which noise is removed from a detection signal and a generated electron beam is effectively utilized in inspection, and a sample inspection method. A sample inspection device provided with a light source for emitting frequency-modulated light, a photocathode for radiating an electron beam in accordance with the reception of the frequency-modulated light, a detector for detecting electrons released from a sample irradiated with the electron beam and generating a detection signal, and a signal extractor for extracting a signal the frequency of which corresponds to the modulating frequency of the frequency-modulated light from among detection signals.
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Inventors:
NISHITANI TOMOHIRO (JP)
KOIZUMI ATSUSHI (JP)
SHIKANO HARUKA (JP)
KOIZUMI ATSUSHI (JP)
SHIKANO HARUKA (JP)
Application Number:
PCT/JP2018/046926
Publication Date:
July 04, 2019
Filing Date:
December 20, 2018
Export Citation:
Assignee:
PHOTO ELECTRON SOUL INC (JP)
International Classes:
H01J37/244; G01N23/2251; H01J37/073; H01J37/252
Domestic Patent References:
| WO2017168554A1 | 2017-10-05 |
Foreign References:
| JP2003303565A | 2003-10-24 | |||
| JPS61184445A | 1986-08-18 | |||
| JPH09298032A | 1997-11-18 | |||
| JPS63266754A | 1988-11-02 | |||
| JP2005071775A | 2005-03-17 | |||
| JP2014092514A | 2014-05-19 |
Other References:
See also references of EP 3734641A4
Attorney, Agent or Firm:
MATSUMOTO Seiji (JP)
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