Title:
SPHERICAL INORGANIC PARTICLES HAVING SURFACE BUMPS FORMED THEREON, AND METHOD OF MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2021/172954
Kind Code:
A3
Abstract:
Inorganic particles according to the present invention are composed of aggregations of crystalline and amorphous microparticles, and each exhibit a spherical smooth surface. Spherical appearance, low crystallinity, and narrow particle size distribution of the inorganic particles are further advantageous in reducing scratch defects in a CMP process. In addition, since the microparticles on the inorganic particle surfaces provide more active sites, the inorganic particles provide an excellent removal rate, and thus are advantageous as a next-generation CMP polishing material.
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Inventors:
NAM JAE-DO (KR)
KIM NA YEON (KR)
PARK IN-KYUNG (KR)
HWANG UISEOUK (KR)
KIM DONGHAK (KR)
KIM NA YEON (KR)
PARK IN-KYUNG (KR)
HWANG UISEOUK (KR)
KIM DONGHAK (KR)
Application Number:
PCT/KR2021/002502
Publication Date:
October 21, 2021
Filing Date:
February 26, 2021
Export Citation:
Assignee:
BEAD ORIGIN INC (KR)
RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV (KR)
RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV (KR)
International Classes:
C09K3/14
Foreign References:
| KR20040080935A | 2004-09-20 | |||
| JP2008169102A | 2008-07-24 | |||
| KR20150093999A | 2015-08-19 | |||
| KR20190058715A | 2019-05-29 | |||
| KR20150013558A | 2015-02-05 |
Attorney, Agent or Firm:
KIM, Aera (KR)
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