Title:
THREE-DIMENSIONAL POSITIONING TABLE
Document Type and Number:
WIPO Patent Application WO/2007/055339
Kind Code:
A1
Abstract:
A three-dimensional positioning table which has a thin and simple structure
and can make a high-precision positioning, and which comprises a base table (11),
an elevating device installed on the base table, a support plate fixed to the upper
part of the elevating device, a table plate (14) disposed on the support plate,
and at least three direct-acting drive devices (17a, 17b, 17c) disposed around
the elevating device on the base table and provided with drive shafts respectively
connected with the table plate via connectors (15a, 15b, 15c), wherein each of
the above connectors comprises, linked in an arbitrary sequence, a first linear
bearing (18) consisting of a rail and a slider disposed vertically to the table
plate, a second linear bearing (19) consisting of a rail and a slider disposed
in a direction perpendicular to the rail of the first bearing, and a swinging unit
(20) provided with a movable unit capable of swinging with a direction vertical
to the table plate as an axis, wherein the rails of the second linear bearings of
at least two connectors out of the above three connectors are disposed to be coaxial
or parallel with each other, and are disposed in a direction perpendicular to
the rail of the second linear bearing of the remaining connector.
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Inventors:
YAMADA MASAAKI (JP)
Application Number:
PCT/JP2006/322504
Publication Date:
May 18, 2007
Filing Date:
November 10, 2006
Export Citation:
Assignee:
HEPHAIST SEIKO CO LTD (JP)
YAMADA MASAAKI (JP)
YAMADA MASAAKI (JP)
International Classes:
B23Q1/48; B23Q1/40; B23Q1/44; G02B21/26
Foreign References:
| JPH04354637A | 1992-12-09 | |||
| JP2004156679A | 2004-06-03 | |||
| JPH04128130U | 1992-11-24 | |||
| JPS5735799B2 | 1982-07-30 | |||
| JPS62180291A | 1987-08-07 | |||
| JP2003215466A | 2003-07-30 |
Attorney, Agent or Firm:
YANAGAWA, Yasuo (2-14 Yotsuy, Shinjuku-ku Tokyo 04, JP)
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