Title:
VACUUM PUMP AND WATER COOLING SPACER
Document Type and Number:
WIPO Patent Application WO/2021/085444
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump that can prevent damage to a water cooling spacer that is one component of an outer case, said damage being caused by destruction of an internal component. [Solution] A vacuum pump (P1) that sucks in gas from an air intake port as a result of the rotation of a rotating body comprises: an outer case (1) comprising the air intake port (1A); a stator column (3) erected inside the outer case; and the rotating body (4) having a shape including the outer circumference of the stator column. The outer case comprises a plurality of components including a water cooling spacer (20) having a water cooling pipe (21) arranged therein. The water cooling spacer comprises a cast material of an aluminum alloy having at least 5% elongation, as a mechanical material property thereof.
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Inventors:
MIWATA TOORU (JP)
TAKAI YOSHIYUKI (JP)
TAKAI YOSHIYUKI (JP)
Application Number:
PCT/JP2020/040330
Publication Date:
May 06, 2021
Filing Date:
October 27, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2019188732A1 | 2019-10-03 |
Foreign References:
| JPH11280689A | 1999-10-15 | |||
| JP2018096336A | 2018-06-21 | |||
| JP2002180988A | 2002-06-26 | |||
| JP2018096336A | 2018-06-21 |
Other References:
See also references of EP 4053415A4
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