Title:
PRESSURE CONTROL VALVE
Document Type and Number:
Japanese Patent JP2020180692
Kind Code:
A
Abstract:
To provide a pressure control valve that has a simple structure, accurately controls pressure, and facilitates the cleaning of particles.SOLUTION: A pressure control valve in the present invention is interposed between a reaction furnace capable of holding the inside of a furnace at a predetermined pressure and an exhaust portion exhausting gas in the reaction furnace, and controls the pressure in the reaction furnace at a predetermined pressure. The pressure control valve includes a: a valve body that has an upper surface plate, a lower surface plate and a cylindrical side surface plate, is equipped with a gas inflow port penetrating the side surface plate and connected to the reaction furnace side and a gas discharging port connected to the exhaust portion side, and is coated with fluorine resin on an inner wall of the side surface plate, b: an orifice plate that is slidably press-contacted on the inner wall of the side surface plate on the gas inflow port side of the valve body, and is provided with a plurality of openings with a different size at a position facing the gas inflow port in a predetermined array, and c: a sliding mechanism that is installed on the inside of the lower surface plate, and holds and slides the orifice plate.SELECTED DRAWING: Figure 1
Inventors:
TERADA TSUNENORI
Application Number:
JP2019086369A
Publication Date:
November 05, 2020
Filing Date:
April 26, 2019
Export Citation:
Assignee:
E NET SYSTEMS COLTD
International Classes:
F16K3/24; F16K51/00
Attorney, Agent or Firm:
Makoto Hagiwara