蒸発源 - APPLIED MATERIALS,INCORPORATED

Title:

蒸発源

Document Type and Number:

Japanese Patent JP6488400

Kind Code:

B2

Abstract:

An evaporation source for a metal or a metal alloy is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the metal or metal alloy, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, wherein the distribution pipe further comprises a first outer tube and a first inner tube, and wherein the distribution pipe and the evaporation crucible are provided as one single piece.

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Inventors:

Bungert, Stephan
Diegos-Campo, Jose Manuel
Keller, Stephan
Spats, norbert

Application Number:

JP2017544306A

Publication Date:

March 20, 2019

Filing Date:

July 13, 2015

Export Citation:

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Assignee:

APPLIED MATERIALS,INCORPORATED

International Classes:

C23C14/24; H01L51/50; H05B33/10; H05B33/26

Domestic Patent References:

JP2013529258A
JP2007031828A
JP2004183100A
JP2010150662A
JP2015501379A
JP2007332458A

Foreign References:

US20150024538
DE102010041376A1

Attorney, Agent or Firm:

Sonoda/Kobayashi Patent Business Corporation

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