Title:
観察装置、測定システム及び観察方法
Document Type and Number:
Japanese Patent JP6640610
Kind Code:
B2
Abstract:
An observation apparatus includes an imaging unit, a driving mechanism and a control unit. The imaging unit takes images of a target object. The driving mechanism moves the imaging unit to change an observation position of the target object. The control unit controls the driving mechanism and the imaging unit while switching between a first mode in which the imaging unit takes images while simultaneously being moved at a high speed by the driving mechanism, and a second mode in which the imaging unit takes images having a higher resolution than the images taken in the first mode while simultaneously being moved at a speed lower than that of the first mode.
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Inventors:
Hiroki Amino
Kawaguchi Katsuhisa
Koji Aota
Osamu Nonaka
Kawaguchi Katsuhisa
Koji Aota
Osamu Nonaka
Application Number:
JP2016041434A
Publication Date:
February 05, 2020
Filing Date:
March 03, 2016
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
C12M1/34; C12M1/00; G01B11/00
Domestic Patent References:
| JP2005295818A | ||||
| JP62035313A | ||||
| JP2011055086A | ||||
| JP2007145198A1 | ||||
| JP2008005048A | ||||
| JP2013142769A | ||||
| JP2006023496A | ||||
| JP2006023175A |
Foreign References:
| US20050272046 |
Other References:
TUMA, T. et al.,Dual-Stage Nanopositioning for High-Speed Scanning Probe Microscopy,IEEE/ASME TRANSACTION OF MECHATRONICS,2014年 6月,Vol.19, No.3,p.1035-1045
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Naoki Kono
Tadashi Inoue
Ukai Ken
Nobuhisa Nogawa
Naoki Kono
Tadashi Inoue
Ukai Ken