Title:
結晶性積層構造体およびその製造方法
Document Type and Number:
Japanese Patent JP6945119
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a high-quality crystalline laminate structure having an epitaxial film of a corundum structure.SOLUTION: A crystalline laminate structure comprises: a crystal substrate 1; a concavo-convex portion composed of a concave or convex portion 2a, and formed on a crystal growth plane of the crystal substrate 1 directly or through another layer; and an epitaxial layer 3 deposited so as to be crystal-grown thereon in a crosswise direction by using a mist CVD method, and including a crystalline semiconductor having a corundum structure as a primary component. In the crystalline laminate structure, the crystal substrate 1 is a sapphire substrate; and the crystalline semiconductor is an oxide including at least gallium.SELECTED DRAWING: Figure 7
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Inventors:
Akio Takatsuka
Shinya Oda
Torami Tora
Shinya Oda
Torami Tora
Application Number:
JP2014239389A
Publication Date:
October 06, 2021
Filing Date:
November 26, 2014
Export Citation:
Assignee:
Flosfia Co., Ltd.
International Classes:
H01L21/20; C23C16/02; C23C16/40; C30B25/18; C30B29/16; H01L21/365
Domestic Patent References:
| JP5343224B1 | ||||
| JP201370072A |