Document Type and Number:
Japanese Patent JPS5197379
Kind Code:
A
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Application Number:
JP2098175A
Publication Date:
August 26, 1976
Filing Date:
February 21, 1975
Export Citation:
International Classes:
H01L23/34; H01L21/34; H01L23/12; H01L23/48; (IPC1-7): H01L21/34; H01L23/12
Domestic Patent References:
JPS4914304U | 1974-02-06 | |||
JPS49115653A | 1974-11-05 |