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Document Type and Number:
Japanese Patent JPS5197380
Kind Code:
A
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Application Number:
JP2227375A
Publication Date:
August 26, 1976
Filing Date:
February 21, 1975
Export Citation:
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International Classes:
G01B11/00; G01N21/88; G01N21/93; G01N21/956; G03F1/00; G03F1/84; H01L21/00; H01L21/027; H01L21/66; (IPC1-7): G03F1/00; H01L21/00



 
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