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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5522939
Kind Code:
B2
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Application Number:
JP11554276A
Publication Date:
June 19, 1980
Filing Date:
September 27, 1976
Export Citation:
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International Classes:
B65G1/07; B65G1/00; B65G60/00; B65H1/28; B65H1/30; B65H3/44; B65H31/00; B65H83/00; H01L21/48; H01L21/50; H01L21/68



 
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