Title:
ABRASIVE PAD
Document Type and Number:
Japanese Patent JP2016124043
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an abrasive pad enabled to reduce a polishing failure by suppressing the occurrence of a particle or scratch while suppressing the reduction of a polishing rate.SOLUTION: A circular polishing sheet 8 or a circular abrasive pad includes a circular abrasive layer. The circular abrasive layer includes a concentric circular groove 10 and one cross-shaped groove 11, and said cross-shaped groove 11 intersects orthogonally at the center of the circular abrasive layer.SELECTED DRAWING: Figure 2
Inventors:
KIMURA TAKESHI
Application Number:
JP2014264564A
Publication Date:
July 11, 2016
Filing Date:
December 26, 2014
Export Citation:
Assignee:
TOYO TIRE & RUBBER CO
International Classes:
B24B37/26; H01L21/304
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office