APPARATUS FOR MANUFACTURING QUARTZ GLASS - Tokuyama Toshiba Ceramics Co., Ltd.

Title:

APPARATUS FOR MANUFACTURING QUARTZ GLASS

Document Type and Number:

Japanese Patent JP3734420

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a manufacturing apparatus capable of obtaining quartz glass having high light transmittance of ≤250 nm wave length easily and at high yield.
SOLUTION: This manufacturing apparatus for quartz glass comprises a melting furnace 1 having exhausting outlet 2, a burner 3 for synthesis with the tip facing the furnace 1 which forms glass particles by flame hydrolysis of supplied gaseous raw material for forming quartz glass, a target 4 for forming ingot disposed in the furnace 1 facing the burner 3 which accumulates and melts the glass particles formed as above into a transparent glass, characterized in that the burner 3 and the furnace 1 are connected via a connecting member 5 forming a part of the wall of the furnace 1 provided with a heating means 6 for maintaining temperature in the outer periphery region of the burner 3 at ≥750°C where a center line average roughness(Ra) of the inner wall is set as ≤2×10-11 m, and the tip side of the burner 3 is supported by fitting in the inserting hole, or characterized in that the exhausting outlet 2 in the furnace 1 is provided with a heating means 6 for maintaining temperature at 1,300 to 1,400°C.

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Inventors:

Takashi Chichimatsu
Masamitsu Kayahara
Hiroki Takahashi
Shiraishi Koichi

Application Number:

JP2000396931A

Publication Date:

January 11, 2006

Filing Date:

December 27, 2000

Export Citation:

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