Title:
ブレード固定装置及びダイシング装置
Document Type and Number:
Japanese Patent JP6846669
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a blade retainer and a dicing device capable of preventing a dicing blade from meandering for a work, by suppressing runout even of such a dicing blade as a hubless blade having a large amount of ejection from a clamping member in the radial direction.SOLUTION: A flange face 44F has an inclined plane from the outer peripheral end 10E of a dicing blade 10 toward the center 10F thereof, separating gradually from the lateral face 10C of the dicing blade 10. Similarly, a flange face 46F has an inclined plane from the outer peripheral end 10E of the dicing blade 10 toward the center 10F thereof, separating gradually from the lateral face 10D of the dicing blade 10.SELECTED DRAWING: Figure 4
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Inventors:
Yusuke Arai
Application Number:
JP2017045098A
Publication Date:
March 24, 2021
Filing Date:
March 09, 2017
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
H01L21/301; B24B45/00
Domestic Patent References:
| JP2017024093A | ||||
| JP56163882A |
Attorney, Agent or Firm:
Kenzo Matsuura