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Title:
基板冷却装置
Document Type and Number:
Japanese Patent JP5028899
Kind Code:
B2
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Inventors:
Koichi Harada
Mitsuhiro Tanaka
Application Number:
JP2006204684A
Publication Date:
September 19, 2012
Filing Date:
July 27, 2006
Export Citation:
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Assignee:
Daikin Industries, Ltd.
International Classes:
H01L21/02; H01L21/027; F25B21/02
Domestic Patent References:
JP2005116839A
JP2004231452A
JP2000294868A
JP9321352A
JP6283493A
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Tomohiro Fukuichi



 
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