PURPOSE: To make accurate and proper adjustments of the fitting positions of individual detected elements in a stage detection means by providing a test mode operation means operated in a test mode to produce a test mode signal.
CONSTITUTION: When a stage signal disappears, the occurrence of a test mode signal from a test mode operation means 8 causes a first drive means 3 to be put in a first (or second) drive condition under the control of a second control means 9b to rise (or lower) a base 1, and the base 1 to be stopped following the occurrence of the stage signal in the said drive condition. Also the occurrence of a placing signal, following the disappearance of the test mode signal when the stage signal disappears, causes the first drive means 3 to be put in the second (or first) drive condition under the control of the second control means 9b to lower (or rise) the base 1, and the base 1 to be stopped following the occurrence of the stage signal in the said drive condition. Accordingly the suitability of the positions of individual detected elements in a stage detecting means 7 can be visually observed with the stopped position of the base 1, and the fitting positions of individual detected elements can be accurately and properly adjusted.
TORITANI KAZUMI
SUYAMA TOMIO
HIRATE YOSHIYUKI