Title:
表示装置およびその製造方法
Document Type and Number:
Japanese Patent JP6815901
Kind Code:
B2
Abstract:
A method of manufacturing a display apparatus having an organic EL element includes: a step of forming the organic EL element over a substrate made of a flexible substrate; and a step of forming a protecting film 16 made of an inorganic insulating material so as to cover the organic EL element by using an ALD method. In the step of forming the protecting film 16, the protecting film 16 is formed by alternately performing a step of forming a high-density layer 16H by using an ALD method and a step of forming, by using an ALD method, a low-density layer 16L that has the same constituent element as the high-density layer 16H and has a lower density than the high-density layer 16H. The protecting film 16 has a layered structure made of one or more high-density layers 16H and one or more low-density layers 16L so that the low-density layer 16L and the high-density layer 16H are alternately layered so as to be in contact with each other.
Inventors:
Keisuke Washio
Tatsuya Matsumoto
Takashi Ebisawa
Junichi Tsukita
Tatsuya Matsumoto
Takashi Ebisawa
Junichi Tsukita
Application Number:
JP2017041318A
Publication Date:
January 20, 2021
Filing Date:
March 06, 2017
Export Citation:
Assignee:
Japan Steel Works, Ltd.
International Classes:
H05B33/04; C23C16/30; C23C16/34; C23C16/40; C23C16/455; C23C16/50; G09F9/30; H01L27/32; H01L51/50; H05B33/02; H05B33/10
Domestic Patent References:
| JP2012521623A | ||||
| JP2012517101A | ||||
| JP2014127323A | ||||
| JP2007220646A | ||||
| JP2004063304A | ||||
| JP2001284042A |
Attorney, Agent or Firm:
Tsutsui International Patent Office