Title:
DRYING METHOD FOR BODY TO BE HEATED, HEATING FURNACE, AND MANUFACTURING METHOD OF DEVICE
Document Type and Number:
Japanese Patent JP3969419
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provided a drying method, a heating furnace, and manufacture of a device capable of continuing a drying process without interruptions while preventing effects to the human body from a leakage current when heating and drying a body to be heated under pressure reduction.
SOLUTION: A drier 100 is provided with a housing chamber 119 capable of housing the body to be heated, a heater 112 heating the housing chamber 119, a pressure reduction pump 116 carrying out pressure reduction, a pressure detection part 117 detecting a pressure, and a leakage current detecting part 118 detecting a leakage current. The leakage current detecting part 118 detects a leakage current, energization to the heater 112 is turned OFF on the basis of a detection result. The pressure detection part 117 detects a pressure, and energization to the heater 112 is turned ON on the basis a detection result. That is to say, in the drier 100, when carrying out heating and drying under pressure reduction, energization to the heater 112 is switched between ON and OFF.
More Like This:
Inventors:
Toshimasa Mori
Application Number:
JP2004364102A
Publication Date:
September 05, 2007
Filing Date:
December 16, 2004
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
F26B5/04; B05C9/14; B05D3/02; B05D3/12; F26B9/06; F26B23/06; G02B5/20; H01L51/50; H05B33/10
Domestic Patent References:
| JP2002506286A | ||||
| JP61035113A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa