Title:
ELECTROSTATIC CHUCK APPARATUS AND EXPOSURE APPARATUS
Document Type and Number:
Japanese Patent JP2006332519
Kind Code:
A
Abstract:
To provide an electrostatic chuck apparatus capable of highly accurately detecting a substrate attaching and detaching state.
The apparatus has an electrostatic chuck for electrostatically attracting a substrate on a attraction surface, and a sensor built in the electrostatic chuck and detecting the substrate attaching and detaching state on the attraction surface without contacting the substrate.
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Inventors:
MIURA NAOMOTO
Application Number:
JP2005157315A
Publication Date:
December 07, 2006
Filing Date:
May 30, 2005
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/683; H01L21/027
Attorney, Agent or Firm:
Furuya Fumio
Toshihide Mori
Toshihide Mori
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