EXPOSING DEVICE AND DEVICE MANUFACTURING METHOD

Title:

EXPOSING DEVICE AND DEVICE MANUFACTURING METHOD

Document Type and Number:

Japanese Patent JP3833209

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To suitably manage a correction parameter to always maintain a high accurate state in a device.
SOLUTION: An amount of correction for correcting the drive of an exposing device is obtained to set the expiration date of the obtained amount of correction (S11, S12). Prior to the execution (S13) of a predetermined exposure process unit by the exposing device, it is determined whether or not the time of completion of the corresponding exposure process passes the expiration date (S15, S16). When the time of completion passes the expiration date, a new amount of correction and its expiration date are obtained (S16, S11, S12).

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Inventors:

Hiromi Kaname

Application Number:

JP2003364955A

Publication Date:

October 11, 2006

Filing Date:

October 24, 2003

Export Citation:

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Assignee:

Canon Inc

International Classes:

G03F7/20; H01L21/027; G03F9/00; G06F7/00; (IPC1-7): H01L21/027; G03F7/20

Domestic Patent References:

JP2003031462A
JP9270382A
JP2001338860A
JP2001326154A
JP2001160535A
JP2001267219A
JP7142314A

Foreign References:

WO2000072365A1

Attorney, Agent or Firm:

Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura

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