Title:
EXPOSING DEVICE AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3833209
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To suitably manage a correction parameter to always maintain a high accurate state in a device.
SOLUTION: An amount of correction for correcting the drive of an exposing device is obtained to set the expiration date of the obtained amount of correction (S11, S12). Prior to the execution (S13) of a predetermined exposure process unit by the exposing device, it is determined whether or not the time of completion of the corresponding exposure process passes the expiration date (S15, S16). When the time of completion passes the expiration date, a new amount of correction and its expiration date are obtained (S16, S11, S12).
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Inventors:
Hiromi Kaname
Application Number:
JP2003364955A
Publication Date:
October 11, 2006
Filing Date:
October 24, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H01L21/027; G03F9/00; G06F7/00; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
JP2003031462A | ||||
JP9270382A | ||||
JP2001338860A | ||||
JP2001326154A | ||||
JP2001160535A | ||||
JP2001267219A | ||||
JP7142314A |
Foreign References:
WO2000072365A1 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
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