FIELD EMISSION TYPE ELECTRON GUN AND ITS STABILIZING METHOD

Japanese Patent JP2964284

B2

PURPOSE: To provide a method for stabilizing the emission current of a field emission type electron gun at ambient temperature in regard to a method for stabilizing the emission current of a field emission type electron gun used for an electron micro-scope, an electron beam exposure device, an electron beam inspection device and the like and a field emission type electron gun used for the execution of the aforesaid method.
CONSTITUTION: Reactive radical is generated by irradiating electromagnetic waves such as ultravilot rays, laser-beam and the like, irradiating corpuscular beam such as electron beam and the like, or irradiating electromagnetic waves such as ultrviolet rays, laser beam and the like with gas enclosed, onto the surface of the cathode 3 of a field emission type electron gun 2, and emission current is constituted to be stabilized by releasing atoms or molecules absorbed in the surface of the cathode 3.

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HONJO ICHIRO

JP27419991A

October 18, 1999

October 22, 1991

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FUJITSU KK

H01J9/02; H01J1/30; H01J1/304; H01J3/02; H01J5/16; H01J37/073; (IPC1-7): H01J1/30; H01J37/073

JP4332424A
JP51105761A
JP5062766A
JP6454639A
JP4711809A
JP422038A
JP534387B2

Seiichi Samukawa

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