Title:
FILTER LOADING DEVICE, FILTER UNIT, AND METHOD OF MANUFACTURING ARTICLE
Document Type and Number:
Japanese Patent JP2016152353
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a filter loading device advantageous in terms of inhibition of particle generation, and facilitation of filter replacement.SOLUTION: A filter loading device 100 for loading a filter unit 60 on a loading surface 80a includes a support structure 80 for supporting the filter unit 60 movably along a loading surface 80b. The support structure 80 has a rotating body 70 in contact with the filter unit 60, and an elastic member 71 for supporting the rotating body 70 displaceably between a first position where the filter unit 60 comes into contact with the loading surface 80b via a seal member 62, and a second position where the filter unit 60 does not come into contact with the loading surface 80b via the seal member 62.SELECTED DRAWING: Figure 1
Inventors:
TONERIKAWA KOICHI
Application Number:
JP2015029814A
Publication Date:
August 22, 2016
Filing Date:
February 18, 2015
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; B01D46/00; G03F7/20
Attorney, Agent or Firm:
Ryoichi Takaoka
Nao Oda
Nao Oda