Title:
浮上搬送装置
Document Type and Number:
Japanese Patent JP6685834
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a floating conveyance device capable of conveying substrates of a plurality of kinds of sizes.SOLUTION: A floating conveyance device 1 includes: conveying means 3 having supporting portions 55, 65, ... which are provided on both side portions of a conveyance path 10 and support both side ends of a substrate P; and a plurality of floating units 4, 4, ... floating the substrate P using pressure of gas. The support portions 55, 55, ... disposed on at least one side portion of the conveyance path 10 are movable in a width direction of the conveyance path 10.SELECTED DRAWING: Figure 6
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Inventors:
Ken Ikeda
Application Number:
JP2016106648A
Publication Date:
April 22, 2020
Filing Date:
May 27, 2016
Export Citation:
Assignee:
Okamura Corporation
International Classes:
H01L21/677; B65G13/12; B65G49/06; B65G49/07; B65G51/03
Domestic Patent References:
| JP2002151571A | ||||
| JP2006206324A | ||||
| JP2010073883A |
Attorney, Agent or Firm:
Kazuo Shigenobu
Ryoichi Mizobuchi
Yoshifumi Ishikawa
Hideki Akiba
Taeko Katata
Michihiro Hayashi
Ryoichi Mizobuchi
Yoshifumi Ishikawa
Hideki Akiba
Taeko Katata
Michihiro Hayashi