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Title:
GAS TREATING DEVICE
Document Type and Number:
Japanese Patent JP2001137640
Kind Code:
A
Abstract:

To provide a gas treating device capable of treating the gas even in the case when the vapor of a high boiling material such as photoresist is contained in the air to be treated.

The air stream quick in flow than that of regenerated air flowing in the desorption zone 5 is generated at the periphery of a desorption zone 5 with a blower for a separator to prevent the regenerated air flowing in the desorption zone 5 from flowing to other than desorption zone 5.


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JPS63190621METHOD OF REMOVING 1,1,1-TRICHLOROETHANE OUT OF GAS CONTAINING 1,1,1-TRICHLOROETHANE
JPH09854ADSORPTION TYPE EXHAUST GAS TREATMENT DEVICE
Inventors:
OKANO HIROSHI
KAWAKAMI YUKIHITO
YAMAUCHI HISASHI
Application Number:
JP29827999A
Publication Date:
May 22, 2001
Filing Date:
October 20, 1999
Export Citation:
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Assignee:
SEIBU GIKEN KK
International Classes:
B01D53/44; B01D53/06; B01D53/26; B01D53/81; F24F3/14; (IPC1-7): B01D53/06



 
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