Title:
GRINDING METHOD
Document Type and Number:
Japanese Patent JP2021150347
Kind Code:
A
Abstract:
To provide a grinding method of reducing a lack amount caused on a back surface side of a ring-shaped reinforcement part.SOLUTION: A grinding method comprises: an inclination grinding step of rotating a grinding wheel 18 having a diameter smaller than a diameter of a chuck table 6 and arranged above the chuck table around a spindle 14e, and grinding a center part on a back face side of a work piece 11 by relatively moving both of the grinding wheel 18 and the chuck table 6 so as to be closer to each other along a direction parallel to an output shaft in a state where the spindle 14e is inclined to the output shaft 8 so that a bottom part of a first part positioned above on an outer peripheral part side of the chuck table of the grinding wheel becomes higher than the bottom part of a second part positioned above a center part side of the chuck table, to form a disc-like concave part 11c on the back face side; and an inclination change and grinding step of grinding the back face side while gradually changing an inclination of the spindle so that the spindle becomes parallel to the output shaft.SELECTED DRAWING: Figure 4
Inventors:
SUZUKI KEIICHI
Application Number:
JP2020045924A
Publication Date:
September 27, 2021
Filing Date:
March 17, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/304; B24B5/06; B24B7/04; B24B41/06
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Ei Okamoto
Takayuki Okano
Tomohiro Okamoto
Kasahara Takahiro
Ei Okamoto
Takayuki Okano