Title:
HEAT TREATMENT FURNACE
Document Type and Number:
Japanese Patent JP2021183873
Kind Code:
A
Abstract:
To provide a heat treatment furnace capable of uniformly heat-treating even a relatively large substrate.SOLUTION: A heat treatment furnace 10 has a housing 11 having a treatment chamber 12 therein and a reflux generation mechanisms 15 provided to generate refluxing of gas in each of a right area AR and a left area AL of the treatment chamber 12. Each of the right and left reflux generation mechanisms 15 has: a duct 21L (21R) for guiding gas from a rear side to a front side; a fan 22L (22R) for generating the reflux by passing the gas in the duct 21L (21R) from the rear side to the front side; a heater 23L (23R) for heating the gas; a filter 24L (24R) discharging the cleaned gas by passing the gas therethrough; and a nozzle 25L (25R) for guiding a part of the gas passing through the filter 24L (24R) to center sides in the right and left directions of the treatment chamber 12, and discharging a part of the gas toward the rear side.SELECTED DRAWING: Figure 1
Inventors:
IZU TAKASHI
Application Number:
JP2020088584A
Publication Date:
December 02, 2021
Filing Date:
May 21, 2020
Export Citation:
Assignee:
KOYO THERMO SYS KK
International Classes:
F27B17/00; F27D7/02; F27D7/04
Attorney, Agent or Firm:
Patent Business Corporation Suncrest International Patent Office