Title:
発熱体モジュール及び発熱体モジュールを含む育成装置
Document Type and Number:
Japanese Patent JP6866706
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heating element module in which deterioration of a heating element and a refractory hardly proceed.SOLUTION: A lower heating element module 3 according to an embodiment of the present invention includes a heating element 3b formed of disilicided molybdenum and a refractory 3a. The heating element 3b is attached to the refractory 3a such that a small diameter part 3b1 as a heating part is disposed at a horizontal distance D1 from the inner wall surface IW1 of the refractory 3a. The horizontal distance D1 is desirably 10 mm or more. The refractory 3a desirably has a cylindrical shape.SELECTED DRAWING: Figure 1
Inventors:
Akira Terashima
Application Number:
JP2017050606A
Publication Date:
April 28, 2021
Filing Date:
March 15, 2017
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
H05B3/10; C30B15/14; F27B14/14; F27D11/02; H05B3/14
Domestic Patent References:
| JP2001194073A | ||||
| JP2003525196A | ||||
| JP2012153570A | ||||
| JP4735594B2 | ||||
| JP4155828A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito