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Title:
HIGH-RESISTANCE RECRYSTALLIZED SILICON CARBIDE, CORROSION- RESISTING MEMBER, PRODUCTION OF HIGH-RESISTANCE RECRYSTALLIZED SILICON CARBIDE AND PRODUCTION OF CORROSION-RESISTING MEMBER
Document Type and Number:
Japanese Patent JP2000007438
Kind Code:
A
Abstract:

To provide a recrystallized silicon carbide large in volume resistivity and to provide the method for producing the high-resistance recrystallized silicon carbide.

This recrystallized silicon carbide has open pores, a carbon layer on the inner wall surface of each open pore is removed by etching and the resistivity at room temp. is ≥10000 Ω.cm. The inner wall surface of the open pore is etched by applying heat treatment in a state that a base composed of the recrystallized silicon carbide having the open pores is dipped into an acid solution. The acid solution preferably contains at least hydrofluoric acid, more preferably hydrofluoric acid and nitric acid, and the temp. of the heat treatment is ≥100°C.


Inventors:
AIHARA YASUFUMI
INOUE KATSUHIRO
Application Number:
JP17594298A
Publication Date:
January 11, 2000
Filing Date:
June 23, 1998
Export Citation:
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Assignee:
NGK INSULATORS LTD
International Classes:
C04B35/565; C04B35/573; C04B38/00; C04B41/53; C04B41/91; (IPC1-7): C04B35/565; C04B41/91
Attorney, Agent or Firm:
Akihide Sugimura (8 outside)