Title:
INTEGRATED WET CLEAN FOR BEVEL TREATMENT
Document Type and Number:
Japanese Patent JP2023017734
Kind Code:
A
Abstract:
To provide cluster tool configurations having wet clean systems and integrated cluster tools with wet clean systems, and substrate processing methods.SOLUTION: An integrated cluster tools or multi-chamber processing system 100 includes a factory interface 101 including one or more transfer robots 103a-103c. The tool further includes: a wet clean system 105 coupled with the factory interface at a first side of the wet clean system; a load lock chamber 112 coupled with the wet clean system at a second side of the wet clean system opposite the first side of the wet clean system; a first transfer chamber 114 coupled with the load lock chamber and including a second transfer robot 126; a second transfer chamber 117 coupled with the first transfer chamber and including a third transfer robot 128; and processing chambers 120a-120d coupled with the transfer chambers and performing deposition of a capping layer, metal or a metal-containing material.SELECTED DRAWING: Figure 1
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Inventors:
BRIAN K KIRKPATRICK
BALASUBRAMANIAN'S PRANATHARTHIHARAN
BALASUBRAMANIAN'S PRANATHARTHIHARAN
Application Number:
JP2022117231A
Publication Date:
February 07, 2023
Filing Date:
July 22, 2022
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
H01L21/677; H01L21/02; H01L21/304
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation