イオン源及び質量分析計

Title:

イオン源及び質量分析計

Document Type and Number:

Japanese Patent JP7204019

Kind Code:

B2

Abstract:

An ion source includes a base, a first chamber, a second chamber and an extractor. The first chamber is disposed downstream of the base and defines a first internal volume having a first pressure. The second chamber is disposed downstream of the first chamber and defines a second internal volume having a second pressure. The second pressure is less than the first pressure. The repeller electrode is disposed within the first chamber. The extractor is disposed downstream of the second chamber.

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Inventors:

Altaev, Viacheslav
Tikhonov, Georgy, Wai

Application Number:

JP2022001998A

Publication Date:

January 13, 2023

Filing Date:

January 10, 2022

Export Citation:

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Assignee:

LECO CORPORATION

International Classes:

G01N27/62; H01J49/10; H01J49/04; H01J49/14; H01J49/16; H01J49/40

Domestic Patent References:

JP11307041A
JP2001273869A
JP2005297173A
JP2008140583A
JP2013241679A
JP2014179230A

Foreign References:

US4749912
EP2363877A1

Attorney, Agent or Firm:

Wataru Kitarai

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