Title:
KINITSUNA CVD MAKUNO KEISEIHO
Document Type and Number:
Japanese Patent JPS5120784
Kind Code:
A
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Inventors:
TSUKUDA YASUO
IMOTO KATSUYUKI
SUGANUMA YASUO
TODA AKIKAZU
SUMI MASAO
IMOTO KATSUYUKI
SUGANUMA YASUO
TODA AKIKAZU
SUMI MASAO
Application Number:
JP9234974A
Publication Date:
February 19, 1976
Filing Date:
August 14, 1974
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C23C16/44; C23C16/455; (IPC1-7): C23C11/00