Title:
LASER BEAM IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JPH04216614
Kind Code:
A
Abstract:
PURPOSE: To manufacture the title laser irradiation device capable of irradiating a semiconductor with stable laser beams not to be affected by the oscillation of a movable part during the laser scanning step.
CONSTITUTION: A stage whereon a galvanoscanner 6 as a movable part for laser scanning step and an fθ lens 7 are arranged is mounted on a stage rack 15 provided independently of another stage rack 14 whereon a semiconductor wafer 9 etc., and other parts are arranged to be composed so that the oscillation may not be transferred between the two racks 14 and 15 from each other.
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Inventors:
AJIKA NATSUO
WAKAMATSU TOSHIAKI
SHIRAHATA MASAYOSHI
WAKAMATSU TOSHIAKI
SHIRAHATA MASAYOSHI
Application Number:
JP41145190A
Publication Date:
August 06, 1992
Filing Date:
December 17, 1990
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/20; H01L21/268; H01L21/84; H01L27/12; (IPC1-7): H01L21/20; H01L21/268; H01L21/84; H01L27/12
Attorney, Agent or Firm:
Kenichi Hayase