Title:
LIGHT IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2023142412
Kind Code:
A
Abstract:
To provide a light irradiation device that can stably irradiate with illumination light having a desired wavelength in a desired amount of light.SOLUTION: A light irradiation device 70 installed in an observation device for observing a semiconductor wafer W includes: a light bulb 701 having a filament; a power source 704 that supplies power to the light bulb 701; a housing 710 that accommodates the light bulb 701; an output port 711 provided in the housing 710 and transmitting light emitted from the light bulb 701; relative distance adjustment means 703 for changing the relative distance between the light bulb 701 and the output port 711; and light amount control means 707 for controlling the amount of light emitted from the output port 711. When the amount of light is changed, the light amount control means 707 changes the relative distance using the relative distance adjustment means 703 while keeping the voltage of the power supplied from the power source 704 constant.SELECTED DRAWING: Figure 3
Inventors:
SASAKI RIKU
SHIMIZU TASUKU
SHIMIZU TASUKU
Application Number:
JP2022049322A
Publication Date:
October 05, 2023
Filing Date:
March 25, 2022
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
H05B39/04; G02B26/02
Attorney, Agent or Firm:
Kenzo Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura