Title:
MANUFACTURE OF INK JET HEAD
Document Type and Number:
Japanese Patent JP3398574
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a small high resolution ink jet head by a structure wherein the part of a piezoelectric element between trenches made therein before sintering serves as a driving part, a peeling agent is applied to the inner surface of the trench and the trench is filled with a filter to provide a post.
SOLUTION: An ink jet head is subjected to trenching from the Mylar film 11 side of a laminate 10 before sintering thus forming a plurality of slits. An electrode 12 is broken at the part corresponding to the slit to bring about a state where a plurality of active parts or driving parts 5 laminated with the electrode 12 are arranged in parallel. A peeling agent 14 is then applied to the inner surface of each slit and a slurry 15 of same composition as the laminate 10 is fed into each slit and dried to form a post after sintering. Subsequently, the Mylar film 11 is peeled off and a ceramic green sheet 16 of same composition as the laminate 10 is laminated and a piezoelectric 1 produced through sintering in the atmosphere is abraded to expose the driving part 5 and the post 6 before a pressure chamber plate 7 having a pressure chamber 8 is bonded.
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Inventors:
Takashi Omote
Mineharu Tsukada
Mineharu Tsukada
Application Number:
JP20688597A
Publication Date:
April 21, 2003
Filing Date:
July 31, 1997
Export Citation:
Assignee:
富士通株式会社
International Classes:
B41J2/045; B41J2/055; B41J2/16; H01L41/09; (IPC1-7): B41J2/16; B41J2/045; B41J2/055; H01L41/09
Domestic Patent References:
| JP1134343A | ||||
| JP4345856A | ||||
| JP3288648A | ||||
| JP8252920A | ||||
| JP8279631A | ||||
| JP8187848A |
Attorney, Agent or Firm:
Takashi Ishida (3 others)
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