Title:
MANUFACTURE OF OXIDE ELEMENT
Document Type and Number:
Japanese Patent JP3862767
Kind Code:
B2
Abstract:
PURPOSE: To provide a manufacturing method of an oxide element which contains a process for adjusting the conductivity of the surface layer of an oxide layer, regarding the manufacturing method of an oxide element wherein an oxide layer of perovskite structure is made to serve as a carrier transit region.
CONSTITUTION: A process for superposing and forming a second oxide layer 12 of perovskite structure on a first oxide layer 11 of perovskite structure which is turned into a base is performed. By heat treatment, at least one out of the following is performed; mutual difusion of bivalent or trivalent elements constituting the first oxide layer and bivalent or trivalent elements constituting the second oxide layer 12, and mutual diffusion of 3d transition metal elements constituting the first oxide layer 11 and 3d transition metal elements constituting the second oxide layer 12. Thereby a process for forming a third oxide layer 13 on the surface layer or the surface of the first oxide layer 11 is contained. The conductivity of the third oxide layer 13 is different from that of the first oxide layer 11 and that of the second oxide film 12.
Inventors:
Yoshida parent and child
Application Number:
JP2374395A
Publication Date:
December 27, 2006
Filing Date:
February 13, 1995
Export Citation:
Assignee:
富士通株式会社
International Classes:
C01B13/14; H01L29/68; C01G1/00; C01G23/00; C01G53/00; C23C14/08; H01B1/08; H01B13/00; H01L39/02; H01L39/24; (IPC1-7): H01L39/24; C01B13/14; C01G23/00; C01G53/00; C23C14/08; H01B1/08; H01B13/00; H01L39/02
Domestic Patent References:
JP64006322A | ||||
JP6151601A | ||||
JP6068529A | ||||
JP6021337A |
Attorney, Agent or Firm:
Keizo Okamoto
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