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Title:
Manufacturing device of single crystal
Document Type and Number:
Japanese Patent JP6223290
Kind Code:
B2
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Inventors:
Tomoaki Furusho
Suzuki Yuya
Application Number:
JP2014132005A
Publication Date:
November 01, 2017
Filing Date:
June 27, 2014
Export Citation:
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Assignee:
Mitsubishi Electric Corporation
International Classes:
C30B23/00; C30B29/36
Domestic Patent References:
JP2009280463A
JP11268990A
JP2008280206A
JP2013166672A
JP2012201584A
JP3295898A
JP2007204309A
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita



 
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