石英ガラス治具の製造方法 - Shin-Etsu Quartz Products Co., Ltd.

Title:

石英ガラス治具の製造方法

Document Type and Number:

Japanese Patent JP4204374

Kind Code:

B2

Abstract:

Production of a quartz glass jig involves processing a quartz glass raw material into a desired shape by a fire working, annealing for stress removal and a cleaning treatments to obtain the final product. A gas phase etching step and a gas phase purification step on a surface layer of the quartz glass jig is performed after applying the annealing for stress removal but before the cleaning treatment. The gas phase purification step is carried out continuously or simultaneously after or with the gas phase etching step.

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Inventors:

Tatsuhiro Sato

Application Number:

JP2003115825A

Publication Date:

January 07, 2009

Filing Date:

April 21, 2003

Export Citation:

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