塩、レジスト組成物及びレジストパターンの製造方法

Title:

塩、レジスト組成物及びレジストパターンの製造方法

Document Type and Number:

Japanese Patent JP5844674

Kind Code:

B2

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Inventors:

Yukako Adachi
Koji Ichikawa

Application Number:

JP2012085117A

Publication Date:

January 20, 2016

Filing Date:

April 04, 2012

Export Citation:

Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C07D295/08; C07C25/18; C07C381/12; C07D295/16; C07D333/46; C09K3/00; G03F7/004; G03F7/039; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Shinki Global IP Patent Corporation

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