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Title:
METHOD OF MANUFACTURING OPTICAL COMPONENT FOR LASER MACHINING
Document Type and Number:
Japanese Patent JP2009192783
Kind Code:
A
Abstract:

To provide a method of manufacturing an optical component for laser machining that reduces surface roughness and light scattering.

The method of manufacturing an optical component for laser machining includes: (a) a process for forming a photoresist film on the surface of a base; (b) a process for forming an unexposed portion having a desired three-dimensional shape by exposing the photoresist film to a laser beam; (c) a process for developing the photoresist film and removing the unexposed portion using a laser beam; (d) a process for heat treating the photoresist film at a temperature at which the photoresist film can be softened; and (e) a process for transferring the three-dimensional shape of the unexposed portion to the base by etching, and forming the three-dimensional shape on the surface of the base.


Inventors:
KURISU KENICHI
NAKAHARA SUMIO
Application Number:
JP2008032886A
Publication Date:
August 27, 2009
Filing Date:
February 14, 2008
Export Citation:
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Assignee:
SUMITOMO ELECTRIC INDUSTRIES
SUMITOMO ELEC HARDMETAL CORP
UNIV KANSAI
International Classes:
G02B3/00; G03F7/40
Domestic Patent References:
JP2004136358A2004-05-13
JPH08166666A1996-06-25
JPS61267313A1986-11-26
JP2003057422A2003-02-26
JP2001236002A2001-08-31
JP2007116016A2007-05-10
JP2005157344A2005-06-16
Attorney, Agent or Firm:
Patent Business Corporation Suncrest International Patent Office



 
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