Title:
MICROWAVE TREATING METHOD AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JPS59119729
Kind Code:
A
Abstract:
PURPOSE:To improve efficiency on the use of microwaves while miniaturizing the device and reducing cost by inserting a slit between a rectangular waveguide and a cavity encasing a sample to be treated and changing a propagation mode into that of a circular waveguide when microwaves from a microwave generating source are introduced into the cavity by using an antenna and the rectangular waveguide. CONSTITUTION:When a mu wave power supply 3 and the cavity 1 as a sample chamber made of Al are connected by using the waveguide 4 incorporating the antenna, the waveguide 4 is not formed to a tapered one, and is made correspond to a closing window 8 made of quartz for the cavity 1 by using the rectangular waveguide, and the slit 10 for changing modes to a circle from a rectangle is inserted. A circular hole 11 is formed at the central section of the slit 10, and a projection 12, one end thereof is directed to the center and thickness thereof is made lambda/4, is formed previously in the hole 11. A wafer 2 loaded on a sample base 13 made of quartz is entered into the cavity 1, the cavity 1 is filled with CF4 and O2 gases, and the wafer 2 is reciprocated in the direction (C) from (A) and in the vertical direction (B) and etched.
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Inventors:
YANO HIROSHI
FUJIMURA SHIYUUZOU
MORIMOTO YOUJI
FUJIMURA SHIYUUZOU
MORIMOTO YOUJI
Application Number:
JP23326082A
Publication Date:
July 11, 1984
Filing Date:
December 25, 1982
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01P1/16; H01L21/302; H01L21/3065; (IPC1-7): H01P1/16
Attorney, Agent or Firm:
Minoru Aoyagi
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