MULTI-WAY REFRIGERATION CYCLE DEVICE

Title:

MULTI-WAY REFRIGERATION CYCLE DEVICE

Document Type and Number:

Japanese Patent JP2022174870

Kind Code:

A

Abstract:

To provide a multi-way refrigeration cycle device that can achieve stable operation and properly cool a semiconductor device manufacturing apparatus.SOLUTION: A multi-way refrigeration cycle device 2 includes: a first refrigeration cycle 5 through which a first refrigerant circulates to exchange heat with a cooling medium for cooling a semiconductor device manufacturing apparatus 1; a second refrigeration cycle 6 through which a second refrigerant circulates to exchange heat with the first refrigerant; and an intermediate medium circulation line 31 through which an intermediate medium circulates between the first refrigeration cycle 5 and the second refrigeration cycle 6.SELECTED DRAWING: Figure 1

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Inventors:

KOHIRO MOTOJI
FUKUZUMI YUKIHIRO
BANNAI NOBUTAKA
MIYATA HIROMASA

Application Number:

JP2021080879A

Publication Date:

November 25, 2022

Filing Date:

May 12, 2021

Export Citation:

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Assignee:

EBARA CORP
EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO LTD

International Classes:

F25B7/00; F25B1/00; H01L21/50; H01L23/427

Attorney, Agent or Firm:

Tetsuya Hirosawa
Yutaro Watanabe

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