Title:
CARRYING DEVICE
Document Type and Number:
Japanese Patent JP2536454
Kind Code:
B2
Abstract:
PURPOSE: To prevent the meandering and rolling of a wafer mounting plate and also prevent the dislocation and falling of a wafer at taking in and out of a wafer cassette.
CONSTITUTION: A first screw shaft 10 rotated by a motor 16 and a second screw shaft 11 of which thread direction is inverse to that of the first screw shaft 10 and which is arranged in parallel with the first screw shaft 10 are installed, a nut is screwed onto both screw shafts 10 and 11, and the nuts are connected to each other by nut housing 14. Also one end of a pair of first links 1 and 2 is fixed to the ends of the first and second screw shafts 10 and 11, respectively, the other end of them is fixed rotatably to one end of a pair of second links, and a wafer loading plate 8 for loading a wafer W is installed at the other end of the pair of second links 3 and 4. Then a pantograph mechanism (links 5, 6, and 7) to specify the position of either link 4 of the pair of second links is installed.
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Inventors:
SOMA KATSUO
Application Number:
JP13136794A
Publication Date:
September 18, 1996
Filing Date:
May 20, 1994
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
B25J9/06; B25J18/02; (IPC1-7): B25J18/02; B25J9/06
Domestic Patent References:
| JP4226878A | ||||
| JP1170584U | ||||
| JP6351830B2 |
Attorney, Agent or Firm:
Yoji Kobashigawa